Silicon Excellence, Engineered for Tomorrow

Customized solutions + product services to accelerate the implementation of project value-added

Oxygen Plasma System

Equipment features:

1. Comprehensive process capabilities

Material activation

Surface stripping

Material modification

Precision etching

Adhesion improvement

Deep cleaning

2. Modular system design

Cavity volume range: 20L-1000L+

Customizable configuration:

Plasma power supply system

Vacuum pump group

Reaction gas control system

Process monitoring module

3. Excellent process performance

Low temperature treatment (<80โ„ƒ)

All-round treatment without dead angles

Treatment effect uniformity>95%

Treatment efficiency increased by 50%

4. Intelligent control system

Digital management of process parameters

Real-time process monitoring

Formula storage and call function

5. Application advantages

Applicable to various complex geometric workpieces

Environmentally friendly and pollution-free

Reduce energy consumption by 30%

Increase production capacity by 40%

Application Areas

  • Each piece of equipment serves a purpose in advancing the study of MEMS devices, LiTaO3, PZT๏ผˆPbZrTiOโ‚ƒ๏ผ‰, photodiodes, metal oxides, metals and other semiconductors.
  • The materials and technologies listed in this presentation are carefully selected to support the development and production of cutting-edge sensors. Each component is tailored for the fabrication of the sensors previously outlined, including metal oxide sensors, optical detectors, gas detection technologies, and piezoelectric/pyroelectric devices. The selected technologies ensure compatibility with 6-inch wafers to meet the requirements of industrial-scale manufacturing processes.
  • Every step of the process, from material preparation to device assembly, has been optimized to support high-volume production while maintaining the flexibility to accommodate a variety of sensor types, including MEMS devices, UV/IR sensors, and biosensors. The focus remains on ensuring the integration of the most reliable and efficient technologies to produce high-quality sensors for diverse applications.

IDM Customization Service

From advanced processes to specialty processes, we use our IDM vertical integration experience to help customers overcome design-process collaboration challenges.

01

Supports advanced nodes such as [5-22nm FinFET/BCD/GAA] to meet the needs of high-performance computing (HPC), AI chips, etc.

02

MPW (Multi-Project Wafer) Service: Small batch trial production to reduce customers' initial costs. Customized process development: Cooperate with customers to conduct DTCO (Design-Process Co-Optimization), customize design rules and process parameters.

03

We support the joint solution of "wafer foundry + advanced packaging" (such as 3D IC, heterogeneous integration) to avoid the loss of multi-supplier collaboration. Unlike pure foundries, we verify the process stability through mass production of our own chips to reduce the risk of tape-out for you.

Provide customers with complete integrated manufacturing services from concept to finished product

01

Electronic manufacturing services and printed circuit board assembly.

02

EMS provides a wide range of electronic manufacturing services, including everything from circuit board design to supply chain management to assembly, testing and after-sales support.

03

PCBA is a link in EMS that focuses on the assembly of printed circuit boards, covering component placement, soldering and related testing, connecting electronic components to manufactured printed circuit boards.

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