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Semiconductor ceramic shells and ceramic substrates in the medical and health industry

Cherpter 1 Constantly achieve micro and integration

  1. High integration and multi-layer circuit design

Through the low-temperature co-firing ceramic (LTCC) technology, the ceramic carrier plate can realize the co-firing integration of more than 30 layers of ceramic layer and metal circuit layer, forming a complex three-dimensional circuit structure. The volume of electronic devices is reduced to less than 1 / 10 of the traditional circuit board, and it also supports high-frequency signal transmission (such as 5G frequency band) to meet the requirements of implantable medical devices (such as cardiac pacemakers, neurostimulators) for miniaturization and high reliability. LTCC substrate has been used in aviation radar microwave components, and its multi-layer stacking structure can realize multi-parameter synchronous monitoring function in medical sensors.

  1. Excellent heat dissipation performance

The high integrated ceramic shell combines CPGA shell porcelain and hot sink block. By optimizing the PIN needle layout and heat conduction path, the heat dissipation efficiency is improved by more than 30%. This feature is particularly important in power-intensive medical devices (e. g., laser therapy device, endoscopic light source module) to ensure the temperature stability of the device during long operation (operating temperature range up to-55℃ to 150℃), reducing the risk of failure due to overheating.

  1. Breakthrough in material properties
  2. Biocompatibility: The folding strength of zirconia toughened alumina (ZTA) and other ceramic materials is more than 600MPa, and the surface roughness is controlled at the nano level. It is suitable for long-term implanted devices such as cochlear implants and bone conduction sensors to reduce tissue rejection.
  3. Chemical stability: Lead-free TD20 series ceramic materials have better acid-alkali corrosion resistance than traditional metal packaging, and can tolerate long-term exposure to biological liquids in the microfluidic chip of hemodialysis equipment.
  4. High frequency characteristics: high frequency packaging TD20 raw porcelain with dielectric loss as low as 0.001 (@10GHz), which supports high precision signal transmission of medical imaging equipment (such as ultrasound probe and MRI coil).
  5. Innovation in the manufacturing process
  6. 3D printing technology: The ceramic substrate is selected by selective laser sintering (SLS) process, which can realize the complex cavity structure with 50μm precision, and is used for customized drug sustained-release chips or tissue engineering scaffolds.
  7. Micro-nano processing: Through the nanoscale slurry printing technology, the surface electrical route width of the ceramic carrier board is reduced to less than 20 μ m, to meet the ultra-thin flexible requirements of wearable medical sensors.
  8. Cost and reliability optimization

Chinese LTCC material reduces the production cost by 50% -70% and maintains the conductivity of 510 ⁶ S/m. All silver system circuit substrate has been used for X-ray tube packaging in CT machine, MTBF (average fault-free time) over 100,000 hours.

  1. Typical application scenarios
Endovirus technology component Endovirus Examples of medical applications Key technical indicators
The LTCC ceramic carrier plate Implantable neural stimulators 30-layer integration / thickness <1mm / permittivity 6.5 ± 0.2
ZTA ceramic tube shell Artificial cochlear electrode array The flexural strength is 620MPa / surface roughness Ra <0.1 μ m
Chemical silver plated substrate Portable ultrasound diagnostic instrument Conductive layer thickness 5 μ m / corrosion resistance (5%NaCl solution 1000h)
3D printed ceramic stents Targeted drug sustained-release chip The pore size accuracy was ± 2 μ m / drug loading capacity> 80mg / cm³

Technological progress not only promotes the development of medical equipment to a smaller and more intelligent direction, but also provides a new technological path for precision medicine and personalized therapy through collaborative innovation in material-process-design.

  • Intelligent detection and feedback
  1. Material performance advantage
  2. High reliability and biological compatibility

Ceramic materials (such as alumina and aluminum nitride) have excellent corrosion resistance, chemical stability and biological compatibility, and are suitable for long-term contact with human skin or implantable medical devices to avoid allergy or rejection reactions. The air tightness of the ceramic tube shell can prevent sweat, disinfectant and other external media from eroding the internal circuit.

  1. Thermal management ability

Ceramic high thermal conductivity (aluminum nitride thermal conductivity up to 170-230 W / m · K) and low thermal expansion coefficient (close to the chip), can effectively conduct the heat generated by sensors or chips in wearable devices, to avoid local overheating impact on human comfort and equipment stability.

  1. Mechanical strength and lightweight

The ceramic high strength (compressive strength up to 300-400 MPa) and low density characteristics enable the device to ensure durability while achieving lightweight design, suitable for long-term wear.

  1. Integration advantages of intelligent detection technology
  2. High-precision defect detection

Using visual detection and meta-learning algorithms, micron-scale defects (such as cracks and bubbles) on the ceramic substrate can be identified in real time to ensure the accuracy of signal transmission of medical sensors.

  1. Multi-sensor fusion and real-time data processing

Through the fusion of infrared, ultrasonic, laser and other sensors, physiological signals (such as heart rate, body temperature) and environmental parameters (such as humidity, pressure), combined with distributed storage and edge computing technology, to achieve millisecond response and feedback.

  1. Adaptive learning ability

The meta-learning technology enables the system to quickly adapt to the changes in the physiological characteristics of different users, such as dynamically adjusting the heart rate abnormal threshold and reducing the false alarm rate.

  1. Application scenarios and performance improvement

-Continuous health monitoring: The high sensitivity sensor of ceramic carrier packaging can support 24 hours of continuous ECG monitoring, and the signal-to-noise ratio is increased by 30%.

-Implantable devices: The insulation and sealing of ceramic tube cases guarantee the long-term reliability of implanted devices such as cardiac pacemakers (life of> 10 years).

-Environmental adaptability: In high temperature sterilization or high humidity medical scenarios, the ceramic packaging equipment can still maintain stable performance, with a failure rate of less than 50% compared to traditional plastic packaging.

  1. Future technology trends

The intelligent detection system will further integrate virtual reality (VR) and augmented reality (AR) technology, which can visually display the defect positioning of the ceramic substrate through AR glasses, or optimize the ergonomic design with the wearing effect of VR simulation equipment.

These technological advantages jointly promote the development of medical wearable devices to higher precision, longer life and better user experience, while providing the hardware foundation for telemedicine and personalized health management.

Chapter 3: High Efficacy and Low energy consumption

  1. Material performance advantages: to support the efficient and stable operation of medical equipment
  2. High thermal conductivity and thermal management capability

Ceramic materials (aluminum nitride AlN thermal conductivity 170 W / m · K, silicon nitride Si3N480 W / m · K) can effectively reduce the temperature of the chip and ensure that the medical equipment remains stable during long time operation. The AMB silicon nitride substrate can withstand the extreme temperature difference of-55℃ to 500℃ in the thermal cycle test, ensuring the long-term reliability of the implantable equipment.

  1. Low-dielectric loss and high-frequency performance

The dielectric loss angle tangof alumina (Al2O3) and silicon nitride substrate (tan δ) is as low as 0.001-0.003@1MHz, which is suitable for high-frequency medical imaging equipment (MRI RF module) to reduce signal transmission loss and improve imaging resolution.

  1. Air tightness and biocompatibility

Excellent air tightness of ceramic tube casing (water vapor permeability is several orders of magnitude lower than plastic packaging). The biological inertia of aluminum nitride / alumina ceramics also reduces the risk of rejection reaction.

  1. Breakthrough in packaging technology: achieve low power consumption and miniaturization of medical equipment
  2. AMB (Active metal brazing) process

High strength bonding between ceramic and metal (interfacial bonding strength> 70 MPa) is achieved through titanium-based active solder, which allows the copper layer thickness of medical sensor carrier to reach more than 200μm, reducing line resistance loss and improving energy efficiency. The power loss of AMB silicon nitride substrate at 300A current is reduced by 40% compared to traditional DBC process.

  1. Precision line processing technology

Ceramic carrier plate (such as DPC / TFC process) can achieve micron level line width (minimum 1 μ m) and low surface roughness (Ra <0.1 μ m) to reduce the loss of skin seeking effect of high-frequency signal transmission. Significant reduced power consumption in portable medical devices (e. g., blood glucose meter, wearable ECG).

  1. Multilayer integration and 3D packaging

HTCC high-temperature cofired ceramic shell supports multi-layer cabling (such as CLCC package), integrates sensors, power management and wireless communication modules to reduce power consumption of peripheral circuits

  1. Typical medical application scenarios and technical indicators
  2. Implantable medical electronics

-Technical index: fracture toughness of silicon nitride AMB substrate 6.5 MPa · m², bending strength 600 MPa, withstand mechanical stress impact in vivo; thermal expansion coefficient (CTE = 3.010 ⁶ / ℃) matches human tissue to reduce thermal stress damage.

-Case: CPGA ceramic tube shell, air tightness meets MIL-STD-883 standard, and service life is> 15 years.

  1. Medical imaging equipment

-Technical indicators: dielectric constant of alumina substrate ε <sub>r</sub>=9.2@60GHz, support 77-81GHz millimeter wave radar (for non-invasive blood glucose monitoring), signal distortion rate <0.5%.

-Case: The CQFP ceramic tube shell of the CT detector passes through 2000 thermal cycles (-55℃ ~175℃) to ensure that the image noise level is <0.1%.

Portable diagnostic equipment

-Technical index: the copper layer thickness of TFC ceramic carrier plate is 10 μ m, and the line resistance is <0.1 Ω / cm², which reduces the power consumption of the blood glucose detection module to 1 mW class.

-Case: The CSOP oxygen sensor is reduced by 50% and extends the battery life to 72 hours.

  1. Future technology trends
  2. Material composite: gradient ceramic substrate (such as AlN / Si3N4 laminate) combines heat dissipation and mechanical strength, which is suitable for high-density implantation equipment such as brain-computer interfaces.
  3. Intelligent process: the integrated production line of magnetron sputtering + lithography (such as the customized equipment of Bozhi Gold Diamond) increases the production yield of ceramic carrier plate to 99% and reduces the cost by 30%.
  4. Integrated packaging: TG glass-based carrier plate supports 3D stacking, realizing multi-functional integration and ultra-low power consumption operation of medical microsystems (such as capsule endoscopy).

Ceramic packaging in the healthcare sector is driving devices toward greater efficiency, reliability, and miniaturization while meeting stringent medical regulations (ISO 13485) and long-term implantation requirements

Chapter IV: Closed-loop control system

  1. High precision and nanoscale control capability
  2. Closed-loop control accuracy reaches nanometer level

Semiconductor ceramic materials can achieve positioning accuracy at the 10nm level in closed-loop control systems. For example, in piezoelectric drive systems, PID algorithm regulation and hysteresis compensation technology significantly enhance the reliability of precise positioning. This feature is particularly important in scenarios requiring sub-micron operations, such as minimally invasive surgical robots and drug delivery systems.

  1. Fast response and high-frequency performance

The closed-loop system supported by ceramic carrier plate can reach 1000Hz, which can monitor and adjust the working state of medical equipment in real time to ensure the rapid feedback and control of dynamic physiological signals.

  1. Stability advantages brought about by the material characteristics
  2. Chemical stability and corrosion resistance

The chemical inertia of ceramic tube shell makes it to work stably for a long time in the complex medical environment such as body fluids and drugs, avoid the corrosion or ion precipitation problems caused by metal materials, and ensure the long-term reliability of the closed-loop system.

  1. Biocompatibility

The compatibility of ceramic materials with human tissues reduces the rejection risk of implantable devices, while supporting direct contact with biological tissues to achieve accurate physiological parameter monitoring in biosensors

  1. Low power consumption and signal integrity
  2. Low ripple voltage (<30 mV)

The semiconductor ceramic carrier board can reduce the signal interference in the circuit design, and the output voltage ripple is controlled within 30 mV to ensure the stability of the electronic signal transmission of medical equipment (such as closed-loop insulin pump) and avoid false triggering or control deviation.

  1. Efficient energy consumption ratio

The high insulation and thermal stability of ceramic materials reduce energy loss. In the piezoelectric drive system, only 150W power input is required to achieve nanoscale control, which is suitable for portable or implantable medical devices.

  1. Integration and multifunctional design
  2. Miniatures and high-density integration

The ceramic carrier board supports the high-density packaging of microelectronics components. In the intelligent drug carrier, the sensing, control and drug release modules can be integrated to achieve accurate targeted therapy through closed-loop feedback.

  1. Multi-parameter collaborative control

Combined with the sensing function of ceramic materials, the closed-loop system can simultaneously monitor temperature, pressure, pH value and other multidimensional data, and adjust the output parameters in real time through algorithms.

  1. Redundant design and fault self-inspection

The ceramic material-based system can realize fault tolerance control by hysteresis model precompensation and self-diagnosis algorithm.

Through the deep integration of material characteristics and closed-loop control technology, the semiconductor ceramic tube shell and carrier plate have realized the core advantages of high precision, rapid response, low power consumption, high stability and biological safety in the field of medical and health care. These technical indicators not only improve the performance of existing medical devices (artificial joints, insulin pumps), but also provide key support for the development of new intelligent medical systems (e. g., targeted drug delivery, neuromodulation devices)

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